傳感器集成化包括兩類:一種是同類型多個(gè)傳感器的集成,即同一功能的多個(gè)傳感元件用集成工藝在同一平面上排列,組成線性傳感器(如CCD圖像傳感器)。另一種是多功能一體化,如幾種不同的敏感元器件制作在同一硅片上,制成集成化多功能傳感器,集成度高、體積小,容易實(shí)現(xiàn)補(bǔ)償和校正,是當(dāng)前傳感器集成化發(fā)展的主要方向。如意法半導(dǎo)體提出把組合了多個(gè)傳感器的拈作為傳感器中樞來(lái)提高產(chǎn)品功能;東芝公司已開發(fā)出晶圓級(jí)別的組合傳感器,并于今年3月發(fā)布能夠同時(shí)檢測(cè)脈搏、心電、體溫及身體活動(dòng)等4種生命體征信息,并將數(shù)據(jù)無(wú)線發(fā)送至智能手機(jī)或平板電腦等的傳感器拈
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